DEFINING OF ENERGETIC EFFICIENCY OF TRIODE GLOW DISCHARGE ELECTRON GUNS WITH PLANE ADDITIONAL ELECTRODE

Authors

  • I.V. MELNYK
  • A.V. POCHYNOK

DOI:

https://doi.org/10.32782/2618-0340-2018-2-96-104

Keywords:

high voltage glow discharge, anode plasma, triode electrodes’ system, plane electrode, one-dimensional model

Abstract

The mathematical model of triode high-voltage glow discharge electrodes’ system with the plane additional electrode is considered in the article. The proposed model is based on defining the plasma boundary position on the base of solving cubic equation with taking into account the real electrodes’ geometry. The formula for recalculation of plasma boundary position from one-dimensional model to electrodes’ system with conic anode is obtained. The results of calculation of energetic efficiency for real parameters of electron gun are presented and analyzed in the article. Calculation results are compared with experimental data. Obtained accuracy of calculation, in comparing with experimental results, is nearly 10 – 15%.

References

Denbnovetsky, S. V., Melnyk, V. G., & Melnyk, I. V. (2003) High Voltage Glow Discharge Electron Sources And Possibilities of Its Application in Industry for Realising of Different Technological Operations. IEEE Transactions on plasma science, 31, 5, October, 987-993.

Denbnovetsky, S. V., Melnyk, V. G., & Melnyk, I. V. (1997) Model of Beam Formation in a Glow Discharge Electron Gun with a Cold Cathode. Applied Surface Science, 111, 288-294.

Novikov, A. A. (1983) Istochniki elektronov vysokovoltnogo tleyuschego razryada s anodnoy plasmoy [High Voltage Glow Discharge Electron Sources with Anode Plasma]. Moscow: Energoatomizdat. (Published in Russian language).

Grechanyuk, M. I., Melnyk, A. G., Grechanyuk, I. M., Melnyk, V. G., & Kovalchuk, D. V. (2014) Modern Electron Beam Technologies and Equipment for Melting and Physical Vapor Deposition of Different Materials. Elektrotechnica and Electronica (E+E), 49, 5-6, 115-121.

Mattausch, G., Zimmermann, B., Fietzke, F., Heinss, J. P., Graffel, B., Winkler, F., Roegner, F. H., & Metzner C. (2014) Gas Discharge Electron Sources – Proven and Novel Tools for Thin-Film Technologies. Elektrotechnica and Electronica (E+E), 49, 5-6, 183-195.

Ladokhin, S. V., Levitskiy, N. I., & Chernyavsky, V. B. at al. (2007) Elektronnoluchevaya plavka v liteynom proizvodstve [Electron-Beam Melting in Foundry]. Kiev: Stal.

Denbnovetsky, S. V., Melnyk, V. I., Melnyk, I. V., Tugay, B. A. (2002) Model of Control of Glow Discharge Electron Gun Current for Microelectronics Production Applications. Proceedings of the Sixth International Conference on Material Science and Material Properties for Infrared Optoelectronics (Ukraine, Kyiv, May 22-24, 2002), Kyiv: SPIE, 5065, pp. 64-76.

Melnyk, I. V., & Tuhai, S. B. (2012) Modelirovanie Geometrii Granitsy Anodnoy Plasmy v Triodnyh Istochnikah Elektronov Vysokovoltnogo Tleyuschego Razryada [Simulation of Geometry of Anode Plasma Boundary in Triode High Voltage Glow Discharge Electrodes Systems]. Elektronnoe Modelirovanie, 34, 1, 15-28. (Published in Russian Language).

Melnyk, I. V., & Tuhai, S. B. (2012) Analiticheskiy Raschet Polozheniya Granitsy Anоdnoy Plasmy v Vysokovoltnom Rozryadnom Promezhutke pri Zazheganii Vspomogatelnogo Razryada’ [Analytical Calculation of Anode Plasma Boundary Position in a High Voltage Glow Discharge Gap with Lighting of Additional Discharge]. Izvestiya Vuzov. Radioelectronika, 55, 11, pp. 50 – 59. (Published in Russian Language).

Rykalin, N. N., Zuev, I. V., & Uglov, A. A. (1978) Osnovy elektronno-luchevoi obrabotki materialov [Foundation of Electron-Beam Treatment of Materials]. Moscow: Mashinostoenie, (Published in Russian language).

Denbnovetsky, S. V., Melnyk, V. I., Melnyk, I. V., Tugay, B.A. (1998) Investigation of forming of electron beam in glow discharge electron guns with additional electrode. Proceedings of the XVIII-th International Symposium on Discharges and Electrical Insulation in Vacuum. (Netherlands, Eindhoven, August 17-21, 1998), 2, pp. 637-640. DOI: 10.1109/DEIV.1998.738530

Melnyk, I. V., Cytrnyatynskiy, I. S., & Piasetska, N. I. (2016) Iteratively methodic of simulation of triode high voltage glow discharge electrodes systems with taking into account the temperature and mobility of slow electrons in anode plasma. Bulletin of Taras Shevchenko National University of Kyiv. Radio Physics and Electronics. 1 (24), pp. 30-34.

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Published

2023-10-13